12/20/2011	12:32:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2011	12:32:36 AM	Recipe started at 12:32 AM
12/20/2011	12:32:36 AM	Helium valve closed
12/20/2011	12:32:36 AM	H2 valve closed
12/20/2011	12:32:36 AM	BCl3 valve closed
12/20/2011	12:32:36 AM	PH3 valve closed
12/20/2011	12:32:36 AM	SiCl4 pre valve closed
12/20/2011	12:32:36 AM	SiCl4 post valve closed
12/20/2011	12:32:36 AM	Main Vac valve closed
12/20/2011	12:32:36 AM	Bypass valve closed
12/20/2011	12:32:36 AM	Bubbler valve closed
12/20/2011	12:32:36 AM	Helium MFC set to  0.000000
12/20/2011	12:32:36 AM	H2 MFC set to  0.000000
12/20/2011	12:32:36 AM	BCl3 MFC set to  0.000000
12/20/2011	12:32:36 AM	PHl3 MFC set to  0.000000
12/20/2011	12:32:36 AM	SiCl4 MFC set to  0.000000
12/20/2011	12:32:36 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:32:37 AM	Tube furnace set to 0
12/20/2011	12:32:40 AM	H2 valve closed
12/20/2011	12:32:40 AM	BCl3 valve closed
12/20/2011	12:32:40 AM	PH3 valve closed
12/20/2011	12:32:40 AM	SiCl4 pre valve closed
12/20/2011	12:32:40 AM	SiCl4 post valve closed
12/20/2011	12:32:40 AM	Main Vac valve closed
12/20/2011	12:32:40 AM	Bypass valve closed
12/20/2011	12:32:40 AM	Bubbler valve closed
12/20/2011	12:32:40 AM	Helium valve opened
12/20/2011	12:32:40 AM	Helium MFC set to  500.000000
12/20/2011	12:32:40 AM	H2 MFC set to  0.000000
12/20/2011	12:32:40 AM	BCl3 MFC set to  0.000000
12/20/2011	12:32:40 AM	PHl3 MFC set to  0.000000
12/20/2011	12:32:40 AM	SiCl4 MFC set to  0.000000
12/20/2011	12:32:40 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:32:40 AM	Tube furnace set to 0
12/20/2011	12:33:46 AM	Helium valve closed
12/20/2011	12:33:46 AM	H2 valve closed
12/20/2011	12:33:46 AM	BCl3 valve closed
12/20/2011	12:33:46 AM	PH3 valve closed
12/20/2011	12:33:46 AM	SiCl4 pre valve closed
12/20/2011	12:33:46 AM	SiCl4 post valve closed
12/20/2011	12:33:46 AM	Main Vac valve closed
12/20/2011	12:33:46 AM	Bypass valve closed
12/20/2011	12:33:46 AM	Bubbler valve closed
12/20/2011	12:33:46 AM	Helium MFC set to  0.000000
12/20/2011	12:33:46 AM	H2 MFC set to  0.000000
12/20/2011	12:33:46 AM	BCl3 MFC set to  0.000000
12/20/2011	12:33:46 AM	PHl3 MFC set to  0.000000
12/20/2011	12:33:46 AM	SiCl4 MFC set to  0.000000
12/20/2011	12:33:46 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:33:46 AM	Tube furnace set to 0
12/20/2011	12:33:47 AM	Run finished at 12:33 AM
12/20/2011	12:33:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2011	12:35:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	12:35:10 AM	Recipe started at 12:35 AM
12/20/2011	12:35:10 AM	Helium valve closed
12/20/2011	12:35:10 AM	H2 valve closed
12/20/2011	12:35:10 AM	BCl3 valve closed
12/20/2011	12:35:10 AM	PH3 valve closed
12/20/2011	12:35:10 AM	SiCl4 pre valve closed
12/20/2011	12:35:10 AM	SiCl4 post valve closed
12/20/2011	12:35:10 AM	Main Vac valve closed
12/20/2011	12:35:10 AM	Bubbler valve closed
12/20/2011	12:35:10 AM	Bypass valve opened
12/20/2011	12:35:10 AM	Helium MFC set to  0.000000
12/20/2011	12:35:10 AM	H2 MFC set to  0.000000
12/20/2011	12:35:10 AM	BCl3 MFC set to  0.000000
12/20/2011	12:35:10 AM	PHl3 MFC set to  0.000000
12/20/2011	12:35:10 AM	SiCl4 MFC set to  0.000000
12/20/2011	12:35:10 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:35:11 AM	Tube furnace set to 0
12/20/2011	12:37:01 AM	Helium valve closed
12/20/2011	12:37:01 AM	H2 valve closed
12/20/2011	12:37:01 AM	BCl3 valve closed
12/20/2011	12:37:01 AM	PH3 valve closed
12/20/2011	12:37:01 AM	SiCl4 pre valve closed
12/20/2011	12:37:01 AM	SiCl4 post valve closed
12/20/2011	12:37:01 AM	Main Vac valve closed
12/20/2011	12:37:01 AM	Bubbler valve closed
12/20/2011	12:37:01 AM	Bypass valve opened
12/20/2011	12:37:01 AM	Helium MFC set to  0.000000
12/20/2011	12:37:01 AM	H2 MFC set to  0.000000
12/20/2011	12:37:01 AM	BCl3 MFC set to  0.000000
12/20/2011	12:37:01 AM	PHl3 MFC set to  0.000000
12/20/2011	12:37:01 AM	SiCl4 MFC set to  0.000000
12/20/2011	12:37:01 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:37:01 AM	Tube furnace set to 0
12/20/2011	12:37:10 AM	Helium valve closed
12/20/2011	12:37:10 AM	H2 valve closed
12/20/2011	12:37:10 AM	BCl3 valve closed
12/20/2011	12:37:10 AM	PH3 valve closed
12/20/2011	12:37:10 AM	SiCl4 pre valve closed
12/20/2011	12:37:10 AM	SiCl4 post valve closed
12/20/2011	12:37:10 AM	Bypass valve closed
12/20/2011	12:37:10 AM	Bubbler valve closed
12/20/2011	12:37:10 AM	Main Vac valve opened
12/20/2011	12:37:10 AM	Helium MFC set to  0.000000
12/20/2011	12:37:10 AM	H2 MFC set to  0.000000
12/20/2011	12:37:10 AM	BCl3 MFC set to  0.000000
12/20/2011	12:37:10 AM	PHl3 MFC set to  0.000000
12/20/2011	12:37:10 AM	SiCl4 MFC set to  0.000000
12/20/2011	12:37:10 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:37:10 AM	Tube furnace set to 0
12/20/2011	12:37:11 AM	Run finished at 12:37 AM
12/20/2011	12:37:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	9:21:08 AM	Main Vac valve closed
12/20/2011	9:21:43 AM	Main Vac valve opened
12/20/2011	9:22:26 AM	Recipe started at 9:22 AM
12/20/2011	9:22:26 AM	Helium valve closed
12/20/2011	9:22:26 AM	H2 valve closed
12/20/2011	9:22:26 AM	BCl3 valve closed
12/20/2011	9:22:26 AM	PH3 valve closed
12/20/2011	9:22:26 AM	SiCl4 pre valve closed
12/20/2011	9:22:26 AM	SiCl4 post valve closed
12/20/2011	9:22:26 AM	Main Vac valve closed
12/20/2011	9:22:26 AM	Bypass valve closed
12/20/2011	9:22:26 AM	Bubbler valve closed
12/20/2011	9:22:26 AM	Helium MFC set to  0.000000
12/20/2011	9:22:26 AM	H2 MFC set to  0.000000
12/20/2011	9:22:26 AM	BCl3 MFC set to  0.000000
12/20/2011	9:22:26 AM	PHl3 MFC set to  0.000000
12/20/2011	9:22:26 AM	SiCl4 MFC set to  0.000000
12/20/2011	9:22:26 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	9:22:26 AM	Tube furnace set to 0
12/20/2011	9:22:29 AM	Helium valve closed
12/20/2011	9:22:29 AM	BCl3 valve closed
12/20/2011	9:22:29 AM	PH3 valve closed
12/20/2011	9:22:29 AM	SiCl4 pre valve closed
12/20/2011	9:22:29 AM	SiCl4 post valve closed
12/20/2011	9:22:29 AM	Main Vac valve closed
12/20/2011	9:22:29 AM	Bypass valve closed
12/20/2011	9:22:29 AM	Bubbler valve closed
12/20/2011	9:22:29 AM	H2 valve opened
12/20/2011	9:22:29 AM	Helium MFC set to  0.000000
12/20/2011	9:22:29 AM	H2 MFC set to  500.000000
12/20/2011	9:22:29 AM	BCl3 MFC set to  0.000000
12/20/2011	9:22:29 AM	PHl3 MFC set to  0.000000
12/20/2011	9:22:29 AM	SiCl4 MFC set to  0.000000
12/20/2011	9:22:29 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	9:22:30 AM	Tube furnace set to 0
12/20/2011	9:23:38 AM	Helium valve closed
12/20/2011	9:23:38 AM	BCl3 valve closed
12/20/2011	9:23:38 AM	PH3 valve closed
12/20/2011	9:23:38 AM	SiCl4 pre valve closed
12/20/2011	9:23:38 AM	SiCl4 post valve closed
12/20/2011	9:23:38 AM	Main Vac valve closed
12/20/2011	9:23:38 AM	Bypass valve closed
12/20/2011	9:23:38 AM	H2 valve opened
12/20/2011	9:23:38 AM	Bubbler valve opened
12/20/2011	9:23:38 AM	Helium MFC set to  0.000000
12/20/2011	9:23:38 AM	H2 MFC set to  500.000000
12/20/2011	9:23:38 AM	BCl3 MFC set to  0.000000
12/20/2011	9:23:38 AM	PHl3 MFC set to  0.000000
12/20/2011	9:23:38 AM	SiCl4 MFC set to  0.000000
12/20/2011	9:23:38 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	9:23:38 AM	Tube furnace set to 0
12/20/2011	9:23:40 AM	Helium valve closed
12/20/2011	9:23:40 AM	BCl3 valve closed
12/20/2011	9:23:40 AM	PH3 valve closed
12/20/2011	9:23:40 AM	SiCl4 pre valve closed
12/20/2011	9:23:40 AM	SiCl4 post valve closed
12/20/2011	9:23:40 AM	Main Vac valve closed
12/20/2011	9:23:40 AM	Bypass valve closed
12/20/2011	9:23:40 AM	H2 valve opened
12/20/2011	9:23:40 AM	Bubbler valve opened
12/20/2011	9:23:40 AM	Helium MFC set to  0.000000
12/20/2011	9:23:40 AM	H2 MFC set to  500.000000
12/20/2011	9:23:40 AM	BCl3 MFC set to  0.000000
12/20/2011	9:23:40 AM	PHl3 MFC set to  0.000000
12/20/2011	9:23:40 AM	SiCl4 MFC set to  0.000000
12/20/2011	9:23:40 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	9:23:40 AM	Tube furnace set to 1000
12/20/2011	9:43:40 AM	Helium valve closed
12/20/2011	9:43:40 AM	BCl3 valve closed
12/20/2011	9:43:40 AM	PH3 valve closed
12/20/2011	9:43:40 AM	Main Vac valve closed
12/20/2011	9:43:40 AM	Bypass valve closed
12/20/2011	9:43:40 AM	H2 valve opened
12/20/2011	9:43:40 AM	SiCl4 pre valve opened
12/20/2011	9:43:40 AM	SiCl4 post valve opened
12/20/2011	9:43:40 AM	Bubbler valve opened
12/20/2011	9:43:40 AM	Helium MFC set to  0.000000
12/20/2011	9:43:40 AM	H2 MFC set to  500.000000
12/20/2011	9:43:40 AM	BCl3 MFC set to  0.000000
12/20/2011	9:43:40 AM	PHl3 MFC set to  0.000000
12/20/2011	9:43:40 AM	SiCl4 MFC set to  50.000000
12/20/2011	9:43:40 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	9:43:40 AM	Tube furnace set to 1000
12/20/2011	10:03:40 AM	Helium valve closed
12/20/2011	10:03:40 AM	BCl3 valve closed
12/20/2011	10:03:40 AM	PH3 valve closed
12/20/2011	10:03:40 AM	SiCl4 pre valve closed
12/20/2011	10:03:40 AM	SiCl4 post valve closed
12/20/2011	10:03:40 AM	Main Vac valve closed
12/20/2011	10:03:40 AM	Bypass valve closed
12/20/2011	10:03:40 AM	H2 valve opened
12/20/2011	10:03:40 AM	Bubbler valve opened
12/20/2011	10:03:40 AM	Helium MFC set to  0.000000
12/20/2011	10:03:40 AM	H2 MFC set to  500.000000
12/20/2011	10:03:40 AM	BCl3 MFC set to  0.000000
12/20/2011	10:03:40 AM	PHl3 MFC set to  0.000000
12/20/2011	10:03:40 AM	SiCl4 MFC set to  0.000000
12/20/2011	10:03:40 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	10:03:40 AM	Tube furnace set to 950
12/20/2011	10:08:40 AM	Helium valve closed
12/20/2011	10:08:40 AM	BCl3 valve closed
12/20/2011	10:08:40 AM	PH3 valve closed
12/20/2011	10:08:40 AM	SiCl4 pre valve closed
12/20/2011	10:08:40 AM	SiCl4 post valve closed
12/20/2011	10:08:40 AM	Main Vac valve closed
12/20/2011	10:08:40 AM	Bypass valve closed
12/20/2011	10:08:40 AM	H2 valve opened
12/20/2011	10:08:40 AM	Bubbler valve opened
12/20/2011	10:08:40 AM	Helium MFC set to  0.000000
12/20/2011	10:08:40 AM	H2 MFC set to  500.000000
12/20/2011	10:08:40 AM	BCl3 MFC set to  0.000000
12/20/2011	10:08:40 AM	PHl3 MFC set to  0.000000
12/20/2011	10:08:40 AM	SiCl4 MFC set to  0.000000
12/20/2011	10:08:40 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	10:08:40 AM	Tube furnace set to 850
12/20/2011	10:13:40 AM	H2 valve closed
12/20/2011	10:13:40 AM	BCl3 valve closed
12/20/2011	10:13:40 AM	PH3 valve closed
12/20/2011	10:13:40 AM	SiCl4 pre valve closed
12/20/2011	10:13:40 AM	SiCl4 post valve closed
12/20/2011	10:13:40 AM	Main Vac valve closed
12/20/2011	10:13:40 AM	Bypass valve closed
12/20/2011	10:13:40 AM	Helium valve opened
12/20/2011	10:13:40 AM	Bubbler valve opened
12/20/2011	10:13:40 AM	Helium MFC set to  500.000000
12/20/2011	10:13:40 AM	H2 MFC set to  0.000000
12/20/2011	10:13:40 AM	BCl3 MFC set to  0.000000
12/20/2011	10:13:40 AM	PHl3 MFC set to  0.000000
12/20/2011	10:13:40 AM	SiCl4 MFC set to  0.000000
12/20/2011	10:13:40 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	10:13:40 AM	Tube furnace set to 0
12/20/2011	10:53:40 AM	Helium valve closed
12/20/2011	10:53:40 AM	H2 valve closed
12/20/2011	10:53:41 AM	BCl3 valve closed
12/20/2011	10:53:41 AM	PH3 valve closed
12/20/2011	10:53:41 AM	SiCl4 pre valve closed
12/20/2011	10:53:41 AM	SiCl4 post valve closed
12/20/2011	10:53:41 AM	Main Vac valve closed
12/20/2011	10:53:41 AM	Bypass valve closed
12/20/2011	10:53:41 AM	Bubbler valve closed
12/20/2011	10:53:41 AM	Helium MFC set to  0.000000
12/20/2011	10:53:41 AM	H2 MFC set to  0.000000
12/20/2011	10:53:41 AM	BCl3 MFC set to  0.000000
12/20/2011	10:53:41 AM	PHl3 MFC set to  0.000000
12/20/2011	10:53:41 AM	SiCl4 MFC set to  0.000000
12/20/2011	10:53:41 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	10:53:41 AM	Tube furnace set to 0
12/20/2011	10:53:42 AM	Run finished at 10:53 AM
12/20/2011	11:01:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	11:01:12 AM	Recipe started at 11:01 AM
12/20/2011	11:01:12 AM	Helium valve closed
12/20/2011	11:01:12 AM	H2 valve closed
12/20/2011	11:01:12 AM	BCl3 valve closed
12/20/2011	11:01:12 AM	PH3 valve closed
12/20/2011	11:01:12 AM	SiCl4 pre valve closed
12/20/2011	11:01:12 AM	SiCl4 post valve closed
12/20/2011	11:01:12 AM	Main Vac valve closed
12/20/2011	11:01:12 AM	Bubbler valve closed
12/20/2011	11:01:12 AM	Bypass valve opened
12/20/2011	11:01:12 AM	Helium MFC set to  0.000000
12/20/2011	11:01:12 AM	H2 MFC set to  0.000000
12/20/2011	11:01:12 AM	BCl3 MFC set to  0.000000
12/20/2011	11:01:12 AM	PHl3 MFC set to  0.000000
12/20/2011	11:01:12 AM	SiCl4 MFC set to  0.000000
12/20/2011	11:01:12 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	11:01:12 AM	Tube furnace set to 0
12/20/2011	11:02:28 AM	Helium valve closed
12/20/2011	11:02:28 AM	H2 valve closed
12/20/2011	11:02:28 AM	BCl3 valve closed
12/20/2011	11:02:28 AM	PH3 valve closed
12/20/2011	11:02:28 AM	SiCl4 pre valve closed
12/20/2011	11:02:28 AM	SiCl4 post valve closed
12/20/2011	11:02:28 AM	Main Vac valve closed
12/20/2011	11:02:28 AM	Bubbler valve closed
12/20/2011	11:02:28 AM	Bypass valve opened
12/20/2011	11:02:28 AM	Helium MFC set to  0.000000
12/20/2011	11:02:28 AM	H2 MFC set to  0.000000
12/20/2011	11:02:28 AM	BCl3 MFC set to  0.000000
12/20/2011	11:02:28 AM	PHl3 MFC set to  0.000000
12/20/2011	11:02:28 AM	SiCl4 MFC set to  0.000000
12/20/2011	11:02:28 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	11:02:28 AM	Tube furnace set to 0
12/20/2011	11:02:33 AM	Helium valve closed
12/20/2011	11:02:33 AM	H2 valve closed
12/20/2011	11:02:33 AM	BCl3 valve closed
12/20/2011	11:02:33 AM	PH3 valve closed
12/20/2011	11:02:33 AM	SiCl4 pre valve closed
12/20/2011	11:02:33 AM	SiCl4 post valve closed
12/20/2011	11:02:33 AM	Bypass valve closed
12/20/2011	11:02:33 AM	Bubbler valve closed
12/20/2011	11:02:33 AM	Main Vac valve opened
12/20/2011	11:02:33 AM	Helium MFC set to  0.000000
12/20/2011	11:02:33 AM	H2 MFC set to  0.000000
12/20/2011	11:02:33 AM	BCl3 MFC set to  0.000000
12/20/2011	11:02:33 AM	PHl3 MFC set to  0.000000
12/20/2011	11:02:33 AM	SiCl4 MFC set to  0.000000
12/20/2011	11:02:33 AM	Bypass solenoid MFC set to  0.000000
12/20/2011	11:02:33 AM	Tube furnace set to 0
12/20/2011	11:02:34 AM	Run finished at 11:02 AM
12/20/2011	11:02:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	12:18:31 PM	Main Vac valve closed
12/20/2011	12:18:50 PM	Helium MFC set to  500.000000
12/20/2011	12:18:50 PM	Helium valve opened
12/20/2011	12:19:48 PM	Helium valve closed
12/20/2011	12:19:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	12:19:50 PM	Recipe started at 12:19 PM
12/20/2011	12:19:50 PM	Helium valve closed
12/20/2011	12:19:50 PM	H2 valve closed
12/20/2011	12:19:50 PM	BCl3 valve closed
12/20/2011	12:19:50 PM	PH3 valve closed
12/20/2011	12:19:50 PM	SiCl4 pre valve closed
12/20/2011	12:19:50 PM	SiCl4 post valve closed
12/20/2011	12:19:50 PM	Main Vac valve closed
12/20/2011	12:19:50 PM	Bubbler valve closed
12/20/2011	12:19:50 PM	Bypass valve opened
12/20/2011	12:19:50 PM	Helium MFC set to  0.000000
12/20/2011	12:19:50 PM	H2 MFC set to  0.000000
12/20/2011	12:19:50 PM	BCl3 MFC set to  0.000000
12/20/2011	12:19:50 PM	PHl3 MFC set to  0.000000
12/20/2011	12:19:50 PM	SiCl4 MFC set to  0.000000
12/20/2011	12:19:50 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:19:50 PM	Tube furnace set to 0
12/20/2011	12:20:37 PM	Helium valve closed
12/20/2011	12:20:37 PM	H2 valve closed
12/20/2011	12:20:37 PM	BCl3 valve closed
12/20/2011	12:20:37 PM	PH3 valve closed
12/20/2011	12:20:37 PM	SiCl4 pre valve closed
12/20/2011	12:20:37 PM	SiCl4 post valve closed
12/20/2011	12:20:37 PM	Main Vac valve closed
12/20/2011	12:20:37 PM	Bubbler valve closed
12/20/2011	12:20:38 PM	Bypass valve opened
12/20/2011	12:20:38 PM	Helium MFC set to  0.000000
12/20/2011	12:20:38 PM	H2 MFC set to  0.000000
12/20/2011	12:20:38 PM	BCl3 MFC set to  0.000000
12/20/2011	12:20:38 PM	PHl3 MFC set to  0.000000
12/20/2011	12:20:38 PM	SiCl4 MFC set to  0.000000
12/20/2011	12:20:38 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:20:38 PM	Tube furnace set to 0
12/20/2011	12:20:43 PM	Helium valve closed
12/20/2011	12:20:43 PM	H2 valve closed
12/20/2011	12:20:43 PM	BCl3 valve closed
12/20/2011	12:20:43 PM	PH3 valve closed
12/20/2011	12:20:43 PM	SiCl4 pre valve closed
12/20/2011	12:20:43 PM	SiCl4 post valve closed
12/20/2011	12:20:43 PM	Bypass valve closed
12/20/2011	12:20:43 PM	Bubbler valve closed
12/20/2011	12:20:43 PM	Main Vac valve opened
12/20/2011	12:20:43 PM	Helium MFC set to  0.000000
12/20/2011	12:20:43 PM	H2 MFC set to  0.000000
12/20/2011	12:20:43 PM	BCl3 MFC set to  0.000000
12/20/2011	12:20:43 PM	PHl3 MFC set to  0.000000
12/20/2011	12:20:43 PM	SiCl4 MFC set to  0.000000
12/20/2011	12:20:43 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:20:44 PM	Tube furnace set to 0
12/20/2011	12:20:45 PM	Run finished at 12:20 PM
12/20/2011	12:20:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	12:32:07 PM	Main Vac valve closed
12/20/2011	12:32:21 PM	Main Vac valve opened
12/20/2011	12:41:34 PM	Main Vac valve closed
12/20/2011	12:41:52 PM	Main Vac valve opened
12/20/2011	12:42:43 PM	Recipe started at 12:42 PM
12/20/2011	12:42:43 PM	Helium valve closed
12/20/2011	12:42:43 PM	H2 valve closed
12/20/2011	12:42:43 PM	BCl3 valve closed
12/20/2011	12:42:43 PM	PH3 valve closed
12/20/2011	12:42:43 PM	SiCl4 pre valve closed
12/20/2011	12:42:43 PM	SiCl4 post valve closed
12/20/2011	12:42:43 PM	Main Vac valve closed
12/20/2011	12:42:43 PM	Bypass valve closed
12/20/2011	12:42:43 PM	Bubbler valve closed
12/20/2011	12:42:43 PM	Helium MFC set to  0.000000
12/20/2011	12:42:43 PM	H2 MFC set to  0.000000
12/20/2011	12:42:43 PM	BCl3 MFC set to  0.000000
12/20/2011	12:42:43 PM	PHl3 MFC set to  0.000000
12/20/2011	12:42:43 PM	SiCl4 MFC set to  0.000000
12/20/2011	12:42:43 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:42:43 PM	Tube furnace set to 0
12/20/2011	12:42:46 PM	Helium valve closed
12/20/2011	12:42:46 PM	BCl3 valve closed
12/20/2011	12:42:46 PM	PH3 valve closed
12/20/2011	12:42:46 PM	SiCl4 pre valve closed
12/20/2011	12:42:46 PM	SiCl4 post valve closed
12/20/2011	12:42:46 PM	Main Vac valve closed
12/20/2011	12:42:46 PM	Bypass valve closed
12/20/2011	12:42:46 PM	Bubbler valve closed
12/20/2011	12:42:46 PM	H2 valve opened
12/20/2011	12:42:46 PM	Helium MFC set to  0.000000
12/20/2011	12:42:46 PM	H2 MFC set to  500.000000
12/20/2011	12:42:46 PM	BCl3 MFC set to  0.000000
12/20/2011	12:42:46 PM	PHl3 MFC set to  0.000000
12/20/2011	12:42:46 PM	SiCl4 MFC set to  0.000000
12/20/2011	12:42:46 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:42:46 PM	Tube furnace set to 0
12/20/2011	12:43:53 PM	Helium valve closed
12/20/2011	12:43:53 PM	BCl3 valve closed
12/20/2011	12:43:53 PM	PH3 valve closed
12/20/2011	12:43:53 PM	SiCl4 pre valve closed
12/20/2011	12:43:53 PM	SiCl4 post valve closed
12/20/2011	12:43:53 PM	Main Vac valve closed
12/20/2011	12:43:53 PM	Bypass valve closed
12/20/2011	12:43:53 PM	H2 valve opened
12/20/2011	12:43:53 PM	Bubbler valve opened
12/20/2011	12:43:53 PM	Helium MFC set to  0.000000
12/20/2011	12:43:53 PM	H2 MFC set to  500.000000
12/20/2011	12:43:53 PM	BCl3 MFC set to  0.000000
12/20/2011	12:43:53 PM	PHl3 MFC set to  0.000000
12/20/2011	12:43:53 PM	SiCl4 MFC set to  0.000000
12/20/2011	12:43:53 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:43:54 PM	Tube furnace set to 0
12/20/2011	12:43:55 PM	Helium valve closed
12/20/2011	12:43:55 PM	BCl3 valve closed
12/20/2011	12:43:55 PM	PH3 valve closed
12/20/2011	12:43:55 PM	SiCl4 pre valve closed
12/20/2011	12:43:55 PM	SiCl4 post valve closed
12/20/2011	12:43:55 PM	Main Vac valve closed
12/20/2011	12:43:55 PM	Bypass valve closed
12/20/2011	12:43:55 PM	H2 valve opened
12/20/2011	12:43:55 PM	Bubbler valve opened
12/20/2011	12:43:55 PM	Helium MFC set to  0.000000
12/20/2011	12:43:55 PM	H2 MFC set to  500.000000
12/20/2011	12:43:55 PM	BCl3 MFC set to  0.000000
12/20/2011	12:43:55 PM	PHl3 MFC set to  0.000000
12/20/2011	12:43:55 PM	SiCl4 MFC set to  0.000000
12/20/2011	12:43:55 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	12:43:55 PM	Tube furnace set to 1000
12/20/2011	1:03:55 PM	Helium valve closed
12/20/2011	1:03:55 PM	BCl3 valve closed
12/20/2011	1:03:55 PM	PH3 valve closed
12/20/2011	1:03:55 PM	Main Vac valve closed
12/20/2011	1:03:55 PM	Bypass valve closed
12/20/2011	1:03:55 PM	H2 valve opened
12/20/2011	1:03:55 PM	SiCl4 pre valve opened
12/20/2011	1:03:55 PM	SiCl4 post valve opened
12/20/2011	1:03:55 PM	Bubbler valve opened
12/20/2011	1:03:55 PM	Helium MFC set to  0.000000
12/20/2011	1:03:55 PM	H2 MFC set to  500.000000
12/20/2011	1:03:55 PM	BCl3 MFC set to  0.000000
12/20/2011	1:03:55 PM	PHl3 MFC set to  0.000000
12/20/2011	1:03:55 PM	SiCl4 MFC set to  50.000000
12/20/2011	1:03:55 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	1:03:55 PM	Tube furnace set to 1000
12/20/2011	1:43:55 PM	Helium valve closed
12/20/2011	1:43:55 PM	BCl3 valve closed
12/20/2011	1:43:55 PM	PH3 valve closed
12/20/2011	1:43:55 PM	SiCl4 pre valve closed
12/20/2011	1:43:55 PM	SiCl4 post valve closed
12/20/2011	1:43:55 PM	Main Vac valve closed
12/20/2011	1:43:55 PM	Bypass valve closed
12/20/2011	1:43:55 PM	H2 valve opened
12/20/2011	1:43:55 PM	Bubbler valve opened
12/20/2011	1:43:55 PM	Helium MFC set to  0.000000
12/20/2011	1:43:55 PM	H2 MFC set to  500.000000
12/20/2011	1:43:55 PM	BCl3 MFC set to  0.000000
12/20/2011	1:43:55 PM	PHl3 MFC set to  0.000000
12/20/2011	1:43:55 PM	SiCl4 MFC set to  0.000000
12/20/2011	1:43:55 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	1:43:55 PM	Tube furnace set to 950
12/20/2011	1:48:55 PM	Helium valve closed
12/20/2011	1:48:55 PM	BCl3 valve closed
12/20/2011	1:48:55 PM	PH3 valve closed
12/20/2011	1:48:55 PM	SiCl4 pre valve closed
12/20/2011	1:48:55 PM	SiCl4 post valve closed
12/20/2011	1:48:55 PM	Main Vac valve closed
12/20/2011	1:48:55 PM	Bypass valve closed
12/20/2011	1:48:55 PM	H2 valve opened
12/20/2011	1:48:55 PM	Bubbler valve opened
12/20/2011	1:48:55 PM	Helium MFC set to  0.000000
12/20/2011	1:48:55 PM	H2 MFC set to  500.000000
12/20/2011	1:48:55 PM	BCl3 MFC set to  0.000000
12/20/2011	1:48:55 PM	PHl3 MFC set to  0.000000
12/20/2011	1:48:55 PM	SiCl4 MFC set to  0.000000
12/20/2011	1:48:55 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	1:48:55 PM	Tube furnace set to 850
12/20/2011	1:53:55 PM	H2 valve closed
12/20/2011	1:53:55 PM	BCl3 valve closed
12/20/2011	1:53:55 PM	PH3 valve closed
12/20/2011	1:53:55 PM	SiCl4 pre valve closed
12/20/2011	1:53:55 PM	SiCl4 post valve closed
12/20/2011	1:53:55 PM	Main Vac valve closed
12/20/2011	1:53:55 PM	Bypass valve closed
12/20/2011	1:53:55 PM	Helium valve opened
12/20/2011	1:53:55 PM	Bubbler valve opened
12/20/2011	1:53:55 PM	Helium MFC set to  500.000000
12/20/2011	1:53:55 PM	H2 MFC set to  0.000000
12/20/2011	1:53:55 PM	BCl3 MFC set to  0.000000
12/20/2011	1:53:55 PM	PHl3 MFC set to  0.000000
12/20/2011	1:53:55 PM	SiCl4 MFC set to  0.000000
12/20/2011	1:53:55 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	1:53:56 PM	Tube furnace set to 0
12/20/2011	2:33:56 PM	Helium valve closed
12/20/2011	2:33:56 PM	H2 valve closed
12/20/2011	2:33:56 PM	BCl3 valve closed
12/20/2011	2:33:56 PM	PH3 valve closed
12/20/2011	2:33:56 PM	SiCl4 pre valve closed
12/20/2011	2:33:56 PM	SiCl4 post valve closed
12/20/2011	2:33:56 PM	Main Vac valve closed
12/20/2011	2:33:56 PM	Bypass valve closed
12/20/2011	2:33:56 PM	Bubbler valve closed
12/20/2011	2:33:56 PM	Helium MFC set to  0.000000
12/20/2011	2:33:56 PM	H2 MFC set to  0.000000
12/20/2011	2:33:56 PM	BCl3 MFC set to  0.000000
12/20/2011	2:33:56 PM	PHl3 MFC set to  0.000000
12/20/2011	2:33:56 PM	SiCl4 MFC set to  0.000000
12/20/2011	2:33:56 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	2:33:56 PM	Tube furnace set to 0
12/20/2011	2:33:57 PM	Run finished at 2:33 PM
12/20/2011	2:47:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	2:47:01 PM	Recipe started at 2:47 PM
12/20/2011	2:47:01 PM	Helium valve closed
12/20/2011	2:47:01 PM	H2 valve closed
12/20/2011	2:47:01 PM	BCl3 valve closed
12/20/2011	2:47:01 PM	PH3 valve closed
12/20/2011	2:47:01 PM	SiCl4 pre valve closed
12/20/2011	2:47:01 PM	SiCl4 post valve closed
12/20/2011	2:47:01 PM	Main Vac valve closed
12/20/2011	2:47:01 PM	Bubbler valve closed
12/20/2011	2:47:01 PM	Bypass valve opened
12/20/2011	2:47:01 PM	Helium MFC set to  0.000000
12/20/2011	2:47:01 PM	H2 MFC set to  0.000000
12/20/2011	2:47:01 PM	BCl3 MFC set to  0.000000
12/20/2011	2:47:01 PM	PHl3 MFC set to  0.000000
12/20/2011	2:47:01 PM	SiCl4 MFC set to  0.000000
12/20/2011	2:47:01 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	2:47:01 PM	Tube furnace set to 0
12/20/2011	2:47:47 PM	Helium valve closed
12/20/2011	2:47:47 PM	H2 valve closed
12/20/2011	2:47:47 PM	BCl3 valve closed
12/20/2011	2:47:47 PM	PH3 valve closed
12/20/2011	2:47:47 PM	SiCl4 pre valve closed
12/20/2011	2:47:47 PM	SiCl4 post valve closed
12/20/2011	2:47:47 PM	Main Vac valve closed
12/20/2011	2:47:47 PM	Bubbler valve closed
12/20/2011	2:47:47 PM	Bypass valve opened
12/20/2011	2:47:47 PM	Helium MFC set to  0.000000
12/20/2011	2:47:47 PM	H2 MFC set to  0.000000
12/20/2011	2:47:47 PM	BCl3 MFC set to  0.000000
12/20/2011	2:47:47 PM	PHl3 MFC set to  0.000000
12/20/2011	2:47:47 PM	SiCl4 MFC set to  0.000000
12/20/2011	2:47:47 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	2:47:47 PM	Tube furnace set to 0
12/20/2011	2:48:07 PM	Helium valve closed
12/20/2011	2:48:07 PM	H2 valve closed
12/20/2011	2:48:07 PM	BCl3 valve closed
12/20/2011	2:48:07 PM	PH3 valve closed
12/20/2011	2:48:07 PM	SiCl4 pre valve closed
12/20/2011	2:48:07 PM	SiCl4 post valve closed
12/20/2011	2:48:07 PM	Bypass valve closed
12/20/2011	2:48:07 PM	Bubbler valve closed
12/20/2011	2:48:07 PM	Main Vac valve opened
12/20/2011	2:48:07 PM	Helium MFC set to  0.000000
12/20/2011	2:48:07 PM	H2 MFC set to  0.000000
12/20/2011	2:48:07 PM	BCl3 MFC set to  0.000000
12/20/2011	2:48:07 PM	PHl3 MFC set to  0.000000
12/20/2011	2:48:07 PM	SiCl4 MFC set to  0.000000
12/20/2011	2:48:07 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	2:48:07 PM	Tube furnace set to 0
12/20/2011	2:48:08 PM	Run finished at 2:48 PM
12/20/2011	2:48:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	3:40:52 PM	Main Vac valve closed
12/20/2011	3:40:56 PM	Helium MFC set to  500.000000
12/20/2011	3:40:56 PM	Helium valve opened
12/20/2011	3:41:55 PM	Helium valve closed
12/20/2011	3:41:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	3:41:56 PM	Recipe started at 3:41 PM
12/20/2011	3:41:56 PM	Helium valve closed
12/20/2011	3:41:56 PM	H2 valve closed
12/20/2011	3:41:56 PM	BCl3 valve closed
12/20/2011	3:41:56 PM	PH3 valve closed
12/20/2011	3:41:56 PM	SiCl4 pre valve closed
12/20/2011	3:41:56 PM	SiCl4 post valve closed
12/20/2011	3:41:56 PM	Main Vac valve closed
12/20/2011	3:41:56 PM	Bubbler valve closed
12/20/2011	3:41:56 PM	Bypass valve opened
12/20/2011	3:41:56 PM	Helium MFC set to  0.000000
12/20/2011	3:41:56 PM	H2 MFC set to  0.000000
12/20/2011	3:41:56 PM	BCl3 MFC set to  0.000000
12/20/2011	3:41:56 PM	PHl3 MFC set to  0.000000
12/20/2011	3:41:56 PM	SiCl4 MFC set to  0.000000
12/20/2011	3:41:56 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	3:41:57 PM	Tube furnace set to 0
12/20/2011	3:43:36 PM	Helium valve closed
12/20/2011	3:43:36 PM	H2 valve closed
12/20/2011	3:43:36 PM	BCl3 valve closed
12/20/2011	3:43:36 PM	PH3 valve closed
12/20/2011	3:43:36 PM	SiCl4 pre valve closed
12/20/2011	3:43:36 PM	SiCl4 post valve closed
12/20/2011	3:43:36 PM	Main Vac valve closed
12/20/2011	3:43:36 PM	Bubbler valve closed
12/20/2011	3:43:36 PM	Bypass valve opened
12/20/2011	3:43:36 PM	Helium MFC set to  0.000000
12/20/2011	3:43:36 PM	H2 MFC set to  0.000000
12/20/2011	3:43:36 PM	BCl3 MFC set to  0.000000
12/20/2011	3:43:36 PM	PHl3 MFC set to  0.000000
12/20/2011	3:43:36 PM	SiCl4 MFC set to  0.000000
12/20/2011	3:43:36 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	3:43:36 PM	Tube furnace set to 0
12/20/2011	3:44:36 PM	Helium valve closed
12/20/2011	3:44:36 PM	H2 valve closed
12/20/2011	3:44:36 PM	BCl3 valve closed
12/20/2011	3:44:36 PM	PH3 valve closed
12/20/2011	3:44:36 PM	SiCl4 pre valve closed
12/20/2011	3:44:36 PM	SiCl4 post valve closed
12/20/2011	3:44:36 PM	Bypass valve closed
12/20/2011	3:44:36 PM	Bubbler valve closed
12/20/2011	3:44:36 PM	Main Vac valve opened
12/20/2011	3:44:36 PM	Helium MFC set to  0.000000
12/20/2011	3:44:36 PM	H2 MFC set to  0.000000
12/20/2011	3:44:36 PM	BCl3 MFC set to  0.000000
12/20/2011	3:44:36 PM	PHl3 MFC set to  0.000000
12/20/2011	3:44:36 PM	SiCl4 MFC set to  0.000000
12/20/2011	3:44:36 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	3:44:36 PM	Tube furnace set to 0
12/20/2011	3:44:37 PM	Run finished at 3:44 PM
12/20/2011	3:44:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	4:23:24 PM	Main Vac valve closed
12/20/2011	4:23:39 PM	Main Vac valve opened
12/20/2011	4:23:53 PM	Recipe started at 4:23 PM
12/20/2011	4:23:53 PM	Helium valve closed
12/20/2011	4:23:53 PM	H2 valve closed
12/20/2011	4:23:53 PM	BCl3 valve closed
12/20/2011	4:23:53 PM	PH3 valve closed
12/20/2011	4:23:53 PM	SiCl4 pre valve closed
12/20/2011	4:23:53 PM	SiCl4 post valve closed
12/20/2011	4:23:53 PM	Main Vac valve closed
12/20/2011	4:23:53 PM	Bypass valve closed
12/20/2011	4:23:53 PM	Bubbler valve closed
12/20/2011	4:23:53 PM	Helium MFC set to  0.000000
12/20/2011	4:23:53 PM	H2 MFC set to  0.000000
12/20/2011	4:23:53 PM	BCl3 MFC set to  0.000000
12/20/2011	4:23:53 PM	PHl3 MFC set to  0.000000
12/20/2011	4:23:53 PM	SiCl4 MFC set to  0.000000
12/20/2011	4:23:53 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	4:23:53 PM	Tube furnace set to 0
12/20/2011	4:23:57 PM	Helium valve closed
12/20/2011	4:23:57 PM	BCl3 valve closed
12/20/2011	4:23:57 PM	PH3 valve closed
12/20/2011	4:23:57 PM	SiCl4 pre valve closed
12/20/2011	4:23:57 PM	SiCl4 post valve closed
12/20/2011	4:23:57 PM	Main Vac valve closed
12/20/2011	4:23:57 PM	Bypass valve closed
12/20/2011	4:23:57 PM	Bubbler valve closed
12/20/2011	4:23:57 PM	H2 valve opened
12/20/2011	4:23:57 PM	Helium MFC set to  0.000000
12/20/2011	4:23:57 PM	H2 MFC set to  500.000000
12/20/2011	4:23:57 PM	BCl3 MFC set to  0.000000
12/20/2011	4:23:57 PM	PHl3 MFC set to  0.000000
12/20/2011	4:23:57 PM	SiCl4 MFC set to  0.000000
12/20/2011	4:23:57 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	4:23:57 PM	Tube furnace set to 0
12/20/2011	4:25:04 PM	Helium valve closed
12/20/2011	4:25:04 PM	BCl3 valve closed
12/20/2011	4:25:04 PM	PH3 valve closed
12/20/2011	4:25:04 PM	SiCl4 pre valve closed
12/20/2011	4:25:04 PM	SiCl4 post valve closed
12/20/2011	4:25:04 PM	Main Vac valve closed
12/20/2011	4:25:04 PM	Bypass valve closed
12/20/2011	4:25:04 PM	H2 valve opened
12/20/2011	4:25:04 PM	Bubbler valve opened
12/20/2011	4:25:04 PM	Helium MFC set to  0.000000
12/20/2011	4:25:04 PM	H2 MFC set to  500.000000
12/20/2011	4:25:04 PM	BCl3 MFC set to  0.000000
12/20/2011	4:25:04 PM	PHl3 MFC set to  0.000000
12/20/2011	4:25:04 PM	SiCl4 MFC set to  0.000000
12/20/2011	4:25:04 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	4:25:04 PM	Tube furnace set to 0
12/20/2011	4:25:05 PM	Helium valve closed
12/20/2011	4:25:05 PM	BCl3 valve closed
12/20/2011	4:25:05 PM	PH3 valve closed
12/20/2011	4:25:05 PM	SiCl4 pre valve closed
12/20/2011	4:25:05 PM	SiCl4 post valve closed
12/20/2011	4:25:05 PM	Main Vac valve closed
12/20/2011	4:25:05 PM	Bypass valve closed
12/20/2011	4:25:05 PM	H2 valve opened
12/20/2011	4:25:05 PM	Bubbler valve opened
12/20/2011	4:25:05 PM	Helium MFC set to  0.000000
12/20/2011	4:25:05 PM	H2 MFC set to  500.000000
12/20/2011	4:25:05 PM	BCl3 MFC set to  0.000000
12/20/2011	4:25:05 PM	PHl3 MFC set to  0.000000
12/20/2011	4:25:05 PM	SiCl4 MFC set to  0.000000
12/20/2011	4:25:05 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	4:25:05 PM	Tube furnace set to 1000
12/20/2011	4:45:05 PM	Helium valve closed
12/20/2011	4:45:05 PM	BCl3 valve closed
12/20/2011	4:45:05 PM	PH3 valve closed
12/20/2011	4:45:05 PM	Main Vac valve closed
12/20/2011	4:45:05 PM	Bypass valve closed
12/20/2011	4:45:05 PM	H2 valve opened
12/20/2011	4:45:05 PM	SiCl4 pre valve opened
12/20/2011	4:45:05 PM	SiCl4 post valve opened
12/20/2011	4:45:05 PM	Bubbler valve opened
12/20/2011	4:45:05 PM	Helium MFC set to  0.000000
12/20/2011	4:45:05 PM	H2 MFC set to  500.000000
12/20/2011	4:45:05 PM	BCl3 MFC set to  0.000000
12/20/2011	4:45:05 PM	PHl3 MFC set to  0.000000
12/20/2011	4:45:05 PM	SiCl4 MFC set to  50.000000
12/20/2011	4:45:05 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	4:45:05 PM	Tube furnace set to 1000
12/20/2011	5:25:06 PM	Helium valve closed
12/20/2011	5:25:06 PM	BCl3 valve closed
12/20/2011	5:25:06 PM	PH3 valve closed
12/20/2011	5:25:06 PM	SiCl4 pre valve closed
12/20/2011	5:25:06 PM	SiCl4 post valve closed
12/20/2011	5:25:06 PM	Main Vac valve closed
12/20/2011	5:25:06 PM	Bypass valve closed
12/20/2011	5:25:06 PM	H2 valve opened
12/20/2011	5:25:06 PM	Bubbler valve opened
12/20/2011	5:25:06 PM	Helium MFC set to  0.000000
12/20/2011	5:25:06 PM	H2 MFC set to  500.000000
12/20/2011	5:25:06 PM	BCl3 MFC set to  0.000000
12/20/2011	5:25:06 PM	PHl3 MFC set to  0.000000
12/20/2011	5:25:06 PM	SiCl4 MFC set to  0.000000
12/20/2011	5:25:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	5:25:06 PM	Tube furnace set to 950
12/20/2011	5:30:06 PM	Helium valve closed
12/20/2011	5:30:06 PM	BCl3 valve closed
12/20/2011	5:30:06 PM	PH3 valve closed
12/20/2011	5:30:06 PM	SiCl4 pre valve closed
12/20/2011	5:30:06 PM	SiCl4 post valve closed
12/20/2011	5:30:06 PM	Main Vac valve closed
12/20/2011	5:30:06 PM	Bypass valve closed
12/20/2011	5:30:06 PM	H2 valve opened
12/20/2011	5:30:06 PM	Bubbler valve opened
12/20/2011	5:30:06 PM	Helium MFC set to  0.000000
12/20/2011	5:30:06 PM	H2 MFC set to  500.000000
12/20/2011	5:30:06 PM	BCl3 MFC set to  0.000000
12/20/2011	5:30:06 PM	PHl3 MFC set to  0.000000
12/20/2011	5:30:06 PM	SiCl4 MFC set to  0.000000
12/20/2011	5:30:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	5:30:06 PM	Tube furnace set to 850
12/20/2011	5:35:06 PM	H2 valve closed
12/20/2011	5:35:06 PM	BCl3 valve closed
12/20/2011	5:35:06 PM	PH3 valve closed
12/20/2011	5:35:06 PM	SiCl4 pre valve closed
12/20/2011	5:35:06 PM	SiCl4 post valve closed
12/20/2011	5:35:06 PM	Main Vac valve closed
12/20/2011	5:35:06 PM	Bypass valve closed
12/20/2011	5:35:06 PM	Helium valve opened
12/20/2011	5:35:06 PM	Bubbler valve opened
12/20/2011	5:35:06 PM	Helium MFC set to  500.000000
12/20/2011	5:35:06 PM	H2 MFC set to  0.000000
12/20/2011	5:35:06 PM	BCl3 MFC set to  0.000000
12/20/2011	5:35:06 PM	PHl3 MFC set to  0.000000
12/20/2011	5:35:06 PM	SiCl4 MFC set to  0.000000
12/20/2011	5:35:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	5:35:06 PM	Tube furnace set to 0
12/20/2011	6:11:45 PM	Run aborted at 6:11 PM
12/20/2011	6:11:45 PM	Helium valve closed
12/20/2011	6:11:45 PM	H2 valve closed
12/20/2011	6:11:45 PM	BCl3 valve closed
12/20/2011	6:11:45 PM	PH3 valve closed
12/20/2011	6:11:45 PM	SiCl4 pre valve closed
12/20/2011	6:11:45 PM	SiCl4 post valve closed
12/20/2011	6:11:45 PM	Bypass valve closed
12/20/2011	6:11:45 PM	Main Vac valve closed
12/20/2011	6:11:45 PM	Bubbler valve closed
12/20/2011	6:11:45 PM	Helium MFC set to  0.000000
12/20/2011	6:11:45 PM	H2 MFC set to  0.000000
12/20/2011	6:11:45 PM	BCl3 MFC set to  0.000000
12/20/2011	6:11:45 PM	PHl3 MFC set to  0.000000
12/20/2011	6:11:45 PM	SiCl4 MFC set to  0.000000
12/20/2011	6:11:45 PM	Tube furnace set to 0
12/20/2011	6:16:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2011	6:16:57 PM	Recipe started at 6:16 PM
12/20/2011	6:16:57 PM	Helium valve closed
12/20/2011	6:16:57 PM	H2 valve closed
12/20/2011	6:16:57 PM	BCl3 valve closed
12/20/2011	6:16:57 PM	PH3 valve closed
12/20/2011	6:16:57 PM	SiCl4 pre valve closed
12/20/2011	6:16:57 PM	SiCl4 post valve closed
12/20/2011	6:16:57 PM	Main Vac valve closed
12/20/2011	6:16:57 PM	Bubbler valve closed
12/20/2011	6:16:57 PM	Bypass valve opened
12/20/2011	6:16:57 PM	Helium MFC set to  0.000000
12/20/2011	6:16:57 PM	H2 MFC set to  0.000000
12/20/2011	6:16:57 PM	BCl3 MFC set to  0.000000
12/20/2011	6:16:57 PM	PHl3 MFC set to  0.000000
12/20/2011	6:16:57 PM	SiCl4 MFC set to  0.000000
12/20/2011	6:16:57 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	6:16:57 PM	Tube furnace set to 0
12/20/2011	6:19:03 PM	Helium valve closed
12/20/2011	6:19:03 PM	H2 valve closed
12/20/2011	6:19:03 PM	BCl3 valve closed
12/20/2011	6:19:03 PM	PH3 valve closed
12/20/2011	6:19:03 PM	SiCl4 pre valve closed
12/20/2011	6:19:03 PM	SiCl4 post valve closed
12/20/2011	6:19:03 PM	Main Vac valve closed
12/20/2011	6:19:03 PM	Bubbler valve closed
12/20/2011	6:19:03 PM	Bypass valve opened
12/20/2011	6:19:03 PM	Helium MFC set to  0.000000
12/20/2011	6:19:03 PM	H2 MFC set to  0.000000
12/20/2011	6:19:03 PM	BCl3 MFC set to  0.000000
12/20/2011	6:19:03 PM	PHl3 MFC set to  0.000000
12/20/2011	6:19:03 PM	SiCl4 MFC set to  0.000000
12/20/2011	6:19:03 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	6:19:03 PM	Tube furnace set to 0
12/20/2011	6:20:03 PM	Helium valve closed
12/20/2011	6:20:03 PM	H2 valve closed
12/20/2011	6:20:03 PM	BCl3 valve closed
12/20/2011	6:20:03 PM	PH3 valve closed
12/20/2011	6:20:03 PM	SiCl4 pre valve closed
12/20/2011	6:20:03 PM	SiCl4 post valve closed
12/20/2011	6:20:03 PM	Bypass valve closed
12/20/2011	6:20:03 PM	Bubbler valve closed
12/20/2011	6:20:03 PM	Main Vac valve opened
12/20/2011	6:20:03 PM	Helium MFC set to  0.000000
12/20/2011	6:20:03 PM	H2 MFC set to  0.000000
12/20/2011	6:20:03 PM	BCl3 MFC set to  0.000000
12/20/2011	6:20:03 PM	PHl3 MFC set to  0.000000
12/20/2011	6:20:03 PM	SiCl4 MFC set to  0.000000
12/20/2011	6:20:03 PM	Bypass solenoid MFC set to  0.000000
12/20/2011	6:20:03 PM	Tube furnace set to 0
12/20/2011	6:20:04 PM	Run finished at 6:20 PM
12/20/2011	6:20:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
